Transaction Details

Footnotes

These shares were sold pursuant to a Rule 10b5-1 Trading Plan established by the Reporting Person on February 10, 2025. | The price reported in column 4 is a weighted average price. These shares were sold in multiple transactions at prices ranging from $140.00 to $146.46, inclusive. The Reporting Person undertakes to provide Entegris, Inc., any shareholder of Entegris, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price within the ranges set forth in this footnote. | This option is fully vested. | Awarded pursuant to the Entegris, Inc. 2020 Stock Plan in consideration of services as an employee.