Transaction Details

Footnotes

The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $61.72 to $62.22, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price. | Of the shares held as of May 20, 2025, 3,586 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.