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$ONTO All transactions

ONTO INNOVATION INC.

A

$ Value

$0

Shares

2,523

Price

$0

Filed

Mar 4

Insider

Name

Chen Shirley

Title

SVP Customer Success

CIK

0002074793

Roles

Officer

Transaction Details

Transaction Date

2026-03-02

Code

A

Table

Non-Derivative

Ownership

Direct

Equity Swap

No

Shares After

15,517

Footnotes

The Reporting Person was granted restricted stock units ("RSUs"), each of which represents a contingent right to receive one (1) share of ONTO Common Stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date. | The Reporting Person was granted performance stock units ("PSUs"), each of which represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Filing Info

Accession No.

0002074793-26-000002

Form Type

4

Issuer CIK

0000704532

Chen Shirley's History

Date Ticker Type Value
2026-03-02 ONTO A $0
2026-03-02 ONTO A $0
2026-03-02 ONTO A $0
2025-09-02 ONTO A $0

Other Insiders at ONTO (90d)

Insider Bought Sold Last
ROBERTS BRIAN K
Chief Financial Officer
2026-03-02
Plisinski Michael P
Chief Executive Officer
2026-03-03
OH Yoon Ah
SVP, Gen Counsel & Corp Sec
2026-03-03
YALDAEI RAMIL
Chief Operating Officer
2026-03-03
Dolev Ido
EVP, Prod Solutions Grp
2026-03-03
Chen Shirley
SVP Customer Success
2026-03-02